MIC TECH’s newly launched MIC-MX12 model five axis full-automatic wafer inspecition microscope is specially designed for large scale electronic component, wafer, epistar, semi-conductor quality checking. With full function such as bright field, dark field, DIC, simple polorizing and other methods, gurantee your high resolution image with sharp contrast.
1. Tilting head 0°-35°, maximum eyepoint to be 139mm
2. Interpupillary ditance 50-76mm, beam splitting ratio 100:0
3. Bright field&dark field sixtuple automatic nosepiece, with stepping motor control, pinion drive;can be switched between manual and automatic, with DIC slot.
4. Each objective aperture diaphragm is prealigned with automatic focus, dark field automatic aperture diaphragm to maximum, at the same time, aperture diaphragm manually adjustable.
5. XY axis with stepping servo motor, maximum speed to 30mm/S, grating ruler resolution reaches 0.1μm, moving range 300x300mm, stage size 495x495mm
6. Z axis with stepping motor, moving range 28mm, with 0.1μm resolution grating ruler, can carry on high precision testing.
7. Powerful testing software
MIC-MX12 Specification:
|
Model |
MIC-MX12M (manual) |
MIC-MX12A (automatic) |
|
|
Alternative method of observation |
Bright field/Dark field/polarizing/DIC |
Bright field/Dark field/polarizing/DIC |
|
|
Optical system |
Infinity color corrected optical system |
||
|
Eyepiece |
High eyepoint plan eyepiece PL10X/25mm |
||
|
Objective |
LMPL-BD infinity LWD high contrast industrial Apo objective (both bright field and dark field available) 4X,5X,10X,20X,40X,50X,80X,100X |
||
|
Viewing head |
Tilting head 0°-35°, maximum eyepoint to be 139mm, trinocular =100:0 or 0:100 Interpupillary ditance 50-76mm, |
||
|
Nosepiece |
Reversed automatic sixtuple nosepiece, both bright field and dark field available ,with DIC slot |
||
|
Stage |
14X12 inches manual stage with clutch hand lever, one press on the lever will easily makes the stage on work , moving range 356mmX305mm, stage size 718mmX420mm |
Automatic stage: XY axis with stepping servo motor, maximum speed to 30mm/S, grating ruler resolution reaches 0.1μm, moving range 300x300mm, stage size 495x495mm Z axis with stepping motor, moving range 28mm, with 0.1μm resolution grating ruler, can carry on high precision testing. |
|
|
Body |
Coaxial coarse and fine focus system, Coarse adjustment range 33 mm; precision of fine adjustment:0.001mm,,with coarse adjustment stop and tightness adjustment. Built-in wide voltage 90V-240V, single power supply output |
Coaxial coarse and fine focus system, Coarse adjustment range 33 mm; precision of fine adjustment:0.001mm,,with coarse adjustment stop and tightness adjustment. Built-in wide voltage 90V-240V, dual power supply output |
|
|
Reflective illumination System |
With iris diaphragm and aperture diaphragm, both centers adjustable, with filter slot and polarizing device slot, switch rod with oblique lighting.12V100W halogen bulb, light intensity continuously adjustable |
||
|
Transmission illumination system |
Single high-power 10W LED, white, light intensity continuously adjustable. N.A.0.5 condenser with iris aperture diaphragm |
Single high-power 10W LED, white, light intensity continuously adjustable. N.A.0.5 condenser with iris aperture diaphragm |
|
